发明授权
US06606782B2 Method of forming a continuous free layer spin valve sensor with patterned exchange underlayer stabilization 失效
形成具有图案交换底层稳定性的连续自由层自旋阀传感器的方法

  • 专利标题: Method of forming a continuous free layer spin valve sensor with patterned exchange underlayer stabilization
  • 专利标题(中): 形成具有图案交换底层稳定性的连续自由层自旋阀传感器的方法
  • 申请号: US10104778
    申请日: 2002-03-22
  • 公开(公告)号: US06606782B2
    公开(公告)日: 2003-08-19
  • 发明人: Tai MinPo-Kang WangMoris Musa Dovek
  • 申请人: Tai MinPo-Kang WangMoris Musa Dovek
  • 主分类号: G11B539
  • IPC分类号: G11B539
Method of forming a continuous free layer spin valve sensor with patterned exchange underlayer stabilization
摘要:
To form a spin valve device, start by forming a gap layer. Form a buffer layer with a layer of refractory material on the buffer layer. Form patterned underlayers including a magnetic material for providing trackwidth and longitudinal bias on the buffer layer comprising either a lower antiferromagnetic layer stacked with a ferromagnetic layer or a Cr layer stacked with a permanent magnetic layer. Form an inwardly tapered depression in the patterned underlayers down to the buffer layer by either ion milling through a mask or a stencil lift off technique. Form layers covering the patterned underlayers that cover the inwardly tapered depression. Form free, pinned, spacer and antiferromagnetic layers. Form conductors either on a surface of the antiferromagnetic layer aside from the depression or between the buffer layer and the patterned underlayers.
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