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US06607993B1 Method using ultraviolet radiation for integrated circuit manufacturing 有权
使用紫外线辐射进行集成电路制造的方法

Method using ultraviolet radiation for integrated circuit manufacturing
摘要:
A method is provided for manufacturing an integrated circuit including a substrate with a gate layer and a gate dielectric provided on the substrate. The gate layer is formed into a gate using a process that imposes a charge in the gate dielectric. The substrate, gate, and gate dielectric are irradiated to discharge the charge across the gate dielectric.
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