发明授权
US06609948B1 Method of making an electronic lapping guide (ELG) for lapping a read sensor 失效
制造用于研磨读取传感器的电子研磨导轨(ELG)的方法

Method of making an electronic lapping guide (ELG) for lapping a read sensor
摘要:
An electronic lapping guide (ELG) and method of making are provided for precisely lapping a read sensor to a designed air bearing surface (ABS). In the method a sensor material layer is formed on a wafer after which a portion of the sensor material layer is removed and ELG material is deposited therein. This is followed by forming track widths and back edges for each of the ELG and the read sensor to be followed by lapping to the ABS. Various films are employed for the ELG to minimize magnetoresistance and optimize the resistance of the ELG. The resistance of the ELG is then sensed by a computer for controlling a lapping tool to lap to the aforementioned ABS.
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