The process of the present invention is directed to a dry cleaning process, comprising the use of volatile cyclic, linear or branched siloxanes in the vapor phase for the cleaning of soiled or stained fabrics. The linear or branched siloxanes have the formula: M2+y+2zDxTyQz wherein M is R13SiO1/2; D is R2R3SiO2/2; T is R4SiO3/2; and Q is SiO4/2 R1, R2, R3 and R4 are each independently a monovalent hydrocarbon radical having from one to forty carbon atoms; and x and y are each integers, wherein 0≦x≦10 and 0≦y≦10 and 0≦z≦10. While the cyclic siloxanes have the formula: wherein R5, R6, R7 and R8 are each independently a monovalent hydrocarbon group having from one to forty carbon atoms; and a and b are each integers wherein 0≦a≦10 and 0≦b≦10, provided that 3≦(a+b)≦10.