发明授权
- 专利标题： MEMS valve
- 专利标题（中）： MEMS阀门
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申请号： US09012309申请日： 1998-01-23
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公开(公告)号： US06612535B1公开(公告)日： 2003-09-02
- 发明人: Yu-Chong Tai , Xing Yang , Charles Grosjean
- 申请人： Yu-Chong Tai , Xing Yang , Charles Grosjean
- 主分类号： F16K3102
- IPC分类号： F16K3102
摘要：
A valve where the valve membrane is made from silicone rubber. Preferably the valve is a microelectromechanical systems (MEMS) thermopneumatic valve. Because of the advantageous physical properties of silicone rubber, the valve provides desirable performance with reasonable power consumption.
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