- 专利标题: Apparatus and method for photoresist stripping
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申请号: US09767300申请日: 2001-01-23
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公开(公告)号: US06613156B2公开(公告)日: 2003-09-02
- 发明人: Yih Chang , Tien-Rong Lu
- 申请人: Yih Chang , Tien-Rong Lu
- 优先权: TW89217656U 20001012
- 主分类号: B08B300
- IPC分类号: B08B300
摘要:
A photoresist stripping apparatus and a corresponding method for removing photoresist layers after a patterned polyimide layer is developed. The photoresist-stripping apparatus includes a transporting unit, a stripping unit, a washing unit, a drying unit and a control unit. The transporting unit connects the stripping unit, the washing unit and the drying unit. The control unit is responsible for controlling the transport sequence and timing of the transporting unit. The method of stripping the photoresist layer off the OLED panel includes providing a stripping solution to the stripping unit to remove photoresist layers. The OLED panel is jet-cleaned with a washing solution in the washing unit so that any residual stripping agent is removed. Finally, the surface of the OLED panel is blown dry.
公开/授权文献
- US20020124875A1 Apparatus and method for photoresist stripping 公开/授权日:2002-09-12
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