- 专利标题: Semiconductor device having a fuse and a fabrication process thereof
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申请号: US10124482申请日: 2002-04-18
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公开(公告)号: US06617664B2公开(公告)日: 2003-09-09
- 发明人: Manabu Hayashi , Junichi Yayanagi
- 申请人: Manabu Hayashi , Junichi Yayanagi
- 优先权: JP9-278316 19971013; JP9-297430 19971029
- 主分类号: H01L2900
- IPC分类号: H01L2900
摘要:
In a semiconductor device having a fuse and an etching stopper film covering the fuse, an optical window exposing the etching stopper film and a contact hole exposing a conductor pattern are formed simultaneously. By applying a dry etching process further to the etching stopper film, an insulation film covering the fuse is exposed in the optical window.
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