Invention Grant
US06617762B2 Microactuator device with a countermeasure for particles on a cut face thereof
失效
微致动器装置,其具有对其切割面上的颗粒的对策
- Patent Title: Microactuator device with a countermeasure for particles on a cut face thereof
- Patent Title (中): 微致动器装置,其具有对其切割面上的颗粒的对策
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Application No.: US09921319Application Date: 2001-08-02
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Publication No.: US06617762B2Publication Date: 2003-09-09
- Inventor: Masayuki Kurano , Tadahiko Horiguchi
- Applicant: Masayuki Kurano , Tadahiko Horiguchi
- Priority: JP2000-235707 20000803
- Main IPC: H01L4108
- IPC: H01L4108

Abstract:
In a microactuator device (2) having a cut face formed by cutting or splitting, the cut face is subjected to anti-release treatment for preventing release of particles produced by cutting. The microactuator device may have a multilayer structure including a plurality of piezoelectric elements and a plurality of internal electrodes alternately laminated. In this case, the multilayer structure has the above-mentioned cut face. It is preferable that the microactuator device is mounted between a base plate (3) to be fixed and a support spring (5) for supporting a head (4), and that the microactuator device and portions of the base plate and the support spring which are adjacent to the microactuator device are collectively coated with a coating film.
Public/Granted literature
- US20020014815A1 Microactuator device with a countermeasure for particles on a cut face thereof Public/Granted day:2002-02-07
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