发明授权
- 专利标题： Optical devices made with vacuum-baked films
- 专利标题（中）： 用真空烘烤膜制成的光学器件
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申请号： US09539385申请日： 2000-03-31
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公开(公告)号： US06618543B1公开(公告)日： 2003-09-09
- 发明人: Hideaki Fujita , Yorishige Ishii , Toshihiro Tamura , Yukio Kurata
- 申请人： Hideaki Fujita , Yorishige Ishii , Toshihiro Tamura , Yukio Kurata
- 优先权： JP11-090528 19990331; JP11-195388 19990709
- 主分类号： G02B610
- IPC分类号： G02B610
摘要：
A method for producing an optical device having a polyimide film through which a light beam is transmitted, which comprises applying a solution containing a polyamic film-forming starting material on a substrate and then baking the resultant under vacuum to form the polyimide film.
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