发明授权
- 专利标题： Micro-electro-mechanical systems switch
- 专利标题（中）： 微机电系统开关
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申请号： US10084561申请日： 2002-02-25
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公开(公告)号： US06621387B1公开(公告)日： 2003-09-16
- 发明人: Matthew A. Hopcroft
- 申请人： Matthew A. Hopcroft
- 主分类号： H01P110
- IPC分类号： H01P110
摘要：
A micro-electro-mechanical switch includes a transmission line having a gap disposed along it. The switch also includes at least one ground plane located proximal to the transmission line. A first bridge is configured to close the gap along the transmission line, and a second bridge is configured to connect the transmission line to the ground plane. A method of manufacturing a micro-electro-mechanical switch includes forming, on a first substrate, a transmission line and at least one ground plane, wherein the transmission line includes a gap along it. The method also includes forming, on a second substrate, a first bridge configured to close the gap disposed along the transmission line, and a second bridge configured to connect the transmission line to the ground plane. Then transferring the first and second bridges to the first substrate.