发明授权
- 专利标题: Method of manufacturing semiconductor device
- 专利标题(中): 制造半导体器件的方法
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申请号: US09800879申请日: 2001-03-07
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公开(公告)号: US06624050B2公开(公告)日: 2003-09-23
- 发明人: Takeshi Matsushita , Shuzo Ohara
- 申请人: Takeshi Matsushita , Shuzo Ohara
- 优先权: JP10-300113 19981021
- 主分类号: H01L2120
- IPC分类号: H01L2120
摘要:
A plurality of solar batteries are provided between a first substrate and a second substrate. The first substrate and the second substrate are formed of, for example, a paper or a non-woven cloth, which is a material including a natural fiber, cellulose, as the main component. Papers and silicon have relatively small difference in coefficient of thermal expansion so that warp caused by changes in the temperature is suppressed. Also, papers are light, easy to be processed and spontaneously decomposed so that disposing becomes easy. The first substrate is preferable to be transparent or semitransparent and preferable to be formed of cellophane paper, glassine paper, parchment paper, or Japanese paper. Oil may be included in the material. The second substrate is preferable to be opaque. A waterproof film may be formed on the first substrate and the second substrate.
公开/授权文献
- US20010007262A1 Method of manufacturing semiconductor device 公开/授权日:2001-07-12
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