发明授权
- 专利标题： Vacuum processing apparatus
- 专利标题（中）： 真空加工设备
-
申请号： US09766597申请日： 2001-01-23
-
公开(公告)号： US06625899B2公开(公告)日： 2003-09-30
- 发明人: Shigekazu Kato , Kouji Nishihata , Tsunehiko Tsubone , Atsushi Itou
- 申请人： Shigekazu Kato , Kouji Nishihata , Tsunehiko Tsubone , Atsushi Itou
- 优先权： JP02-225321 19900829
- 主分类号： F26B1330
- IPC分类号： F26B1330
摘要：
A vacuum processing apparatus which includes a means for transferring substrates from a loader with a transferring device to a double lock chamber and then to a selected vacuum processing chamber. The substrates are then returned to a substrate by the vacuum loader and back into the substrate table. The surfaces of the substrates are maintained in a horizontal position during processing.
公开/授权文献
- US20010009073A1 Vacuum processing apparatus and operating method therfor 公开/授权日：2001-07-26
信息查询
