- 专利标题: Method of and system for improving stability of photomasks
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申请号: US09742970申请日: 2000-12-20
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公开(公告)号: US06627355B2公开(公告)日: 2003-09-30
- 发明人: Harry J. Levinson , Fan Piao , Christopher A. Spence
- 申请人: Harry J. Levinson , Fan Piao , Christopher A. Spence
- 主分类号: G03F900
- IPC分类号: G03F900
摘要:
The present invention provides a method of and system for reducing the absorption of light by opaque material in a photomask. The method includes providing a photomask substrate, and applying an opaque material to one side of the photomask substrate. The interface between the opaque material and photomask substrate reflects at least 80 percent of the light through the photomask.
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