发明授权
- 专利标题: Photoresist monomer comprising bisphenol derivatives and polymers thereof
- 专利标题(中): 包含双酚衍生物的光敏单体及其聚合物
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申请号: US09973630申请日: 2001-10-09
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公开(公告)号: US06627383B2公开(公告)日: 2003-09-30
- 发明人: Geun Su Lee , Jae Chang Jung , Min Ho Jung , Ki Ho Baik
- 申请人: Geun Su Lee , Jae Chang Jung , Min Ho Jung , Ki Ho Baik
- 优先权: KR2000-62882 20001025
- 主分类号: G03C1492
- IPC分类号: G03C1492
摘要:
Photoresist monomers of following Formula 1, photoresist polymers thereof, and photoresist compositions using the same. The photoresist composition has excellent etching resistance, heat resistance and adhesiveness, and is developable in aqueous tetramethylammonium hydroxide (TMAH) solution. In addition, the photoresist composition has low light absorbance at the wavelength of 193 nm, 157 nm and 13 nm, and thus is suitable for a photolithography process using ultraviolet light sources such as VUV (157 nm) and EUV (13 nm) in fabricating a minute circuit for a high integration semiconductor device. wherein, R1, R2, R3, Y, W, m and n are as defined in the specification.
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