发明授权
- 专利标题: Electrocapacitive force measuring apparatus
- 专利标题(中): 电动力测量装置
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申请号: US09674387申请日: 2001-05-17
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公开(公告)号: US06628124B1公开(公告)日: 2003-09-30
- 发明人: Yutaka Yamagata , Tsunehiko Ozaki , Victor Morozov , Kozo Inoue
- 申请人: Yutaka Yamagata , Tsunehiko Ozaki , Victor Morozov , Kozo Inoue
- 优先权: JP11-057381 19990304
- 主分类号: G01R2704
- IPC分类号: G01R2704
摘要:
A sensor unit is formed by a single integral body obtained by coupling a resiliently deforming portion with a base portion without interposing a soft material therebetween, and a force applied to a probe secured to a front end of the resiliently deforming portion is measured as a change in capacitance of a capacitor constituted by electrodes secured to opposing surfaces of the resiliently deforming portion and base portion. These electrodes are connected to a resonance circuit of a high frequency oscillation circuit, and in order to measure a change in a resonance frequency which is varied in accordance with the applied force, an output signal from the high frequency oscillation circuit is counted by a digital frequency counter for a predetermined time period. It is possible to provide the electrocapacitive type force measuring apparatus which can measure a very small force with an extremely high precision without being affected by temperature variation, humidity variation and secular variation.
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