发明授权
- 专利标题： Wavelength detection device for line-narrowed laser apparatus and ultra line-narrowed fluorine laser apparatus
- 专利标题（中）： 线窄激光装置和超线窄氟激光装置的波长检测装置
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申请号： US09716411申请日： 2000-11-21
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公开(公告)号： US06628682B1公开(公告)日： 2003-09-30
- 发明人: Kiwamu Takehisa , Kouji Shio , Shinji Nagai , Yasuaki Iwata , Osamu Wakabayashi
- 申请人： Kiwamu Takehisa , Kouji Shio , Shinji Nagai , Yasuaki Iwata , Osamu Wakabayashi
- 优先权： JP11-347635 19991207; JP11-337948 19991129
- 主分类号： H01S313
- IPC分类号： H01S313
摘要：
Of spontaneous emission beams emitted from a laser medium but not line-narrowed, a spontaneous emission beam whose wavelength approximates a narrowed emission beam and whose light intensity is equal to or higher than a certain level is used as a reference light.
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