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US06630871B2 Center-mass-reduced microbridge structures for ultra-high frequency MEM resonator 失效
用于超高频MEM谐振器的中心质量减小的微桥结构

  • Patent Title: Center-mass-reduced microbridge structures for ultra-high frequency MEM resonator
  • Patent Title (中): 用于超高频MEM谐振器的中心质量减小的微桥结构
  • Application No.: US09967732
    Application Date: 2001-09-28
  • Publication No.: US06630871B2
    Publication Date: 2003-10-07
  • Inventor: Qing Ma , Peng Cheng
  • Applicant: Qing Ma , Peng Cheng
  • Main IPC: H03B530
  • IPC: H03B530
Center-mass-reduced microbridge structures for ultra-high frequency MEM resonator
Abstract:
A micro-electromechanical (MEM) resonator is described that includes a substrate, a microbridge beam structure coupled to the substrate and at least one electrode disposed adjacent to the microbridge beam structure to induce vibration of the beam. The microbridge beam structure includes support sections and a beam formed between the support sections. The center region of the beam has a mass that is less than the mass of regions of the beam adjacent to the support sections.
Abstract(Chinese):

描述了一种微机电（MEM）谐振器，其包括衬底，耦合到衬底的微桥梁结构和邻近微桥梁结构设置的至少一个电极以引起梁的振动。 微桥梁结构包括支撑部分和形成在支撑部分之间的梁。 梁的中心区域的质量小于与支撑部分相邻的梁的区域的质量。

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