发明授权
- 专利标题: Silicon wafer and method for producing silicon single crystal
- 专利标题(中): 硅晶片和硅单晶的制造方法
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申请号: US09979519申请日: 2001-11-23
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公开(公告)号: US06632411B2公开(公告)日: 2003-10-14
- 发明人: Ryoji Hoshi , Izumi Fusegawa , Tomohiko Ohta , Shigemaru Maeda
- 申请人: Ryoji Hoshi , Izumi Fusegawa , Tomohiko Ohta , Shigemaru Maeda
- 优先权: JP2000-92337 20000329
- 主分类号: C30B1502
- IPC分类号: C30B1502
摘要:
The present invention provides a silicon wafer sliced from a silicon single crystal ingot grown by the Czochralski method under such conditions that V-rich region should become dominant, wherein count number of particles having a size of 0.1 &mgr;m or more is 1 count/cm2 or less when particles are counted by using a particle counter and a method for producing a silicon single crystal. Thus, there is provided a production technique that can improve productivity and reduce cost for high quality silicon wafers of excellent device characteristics by further reducing density and size of defects such as COP.
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