发明授权
US06632411B2 Silicon wafer and method for producing silicon single crystal 有权
硅晶片和硅单晶的制造方法

Silicon wafer and method for producing silicon single crystal
摘要:
The present invention provides a silicon wafer sliced from a silicon single crystal ingot grown by the Czochralski method under such conditions that V-rich region should become dominant, wherein count number of particles having a size of 0.1 &mgr;m or more is 1 count/cm2 or less when particles are counted by using a particle counter and a method for producing a silicon single crystal. Thus, there is provided a production technique that can improve productivity and reduce cost for high quality silicon wafers of excellent device characteristics by further reducing density and size of defects such as COP.
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