发明授权
US06633458B2 Rotary piezoelectric microactuator with an optimum suspension arrangement 失效
具有最佳悬挂装置的旋转压电微致动器

Rotary piezoelectric microactuator with an optimum suspension arrangement
摘要:
The invention relates to a microactuator comprising a movable structure having a symmetric axis about which the movable structure are divided into two parts which can produce the same movement but in opposite directions; two active arms built with piezoelectric material; two stationary structures to connect the two active arms at their two ends, respectively. The invention also relates to a disk drive suspension which is incorporated with the microactuator.
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