发明授权
- 专利标题： Vacuum processing apparatus
- 专利标题（中）： 真空加工设备
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申请号： US09781452申请日： 2001-02-13
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公开(公告)号： US06634116B2公开(公告)日： 2003-10-21
- 发明人: Shigekazu Kato , Kouji Nishihata , Tsunehiko Tsubone , Atsushi Itou
- 申请人： Shigekazu Kato , Kouji Nishihata , Tsunehiko Tsubone , Atsushi Itou
- 优先权： JP2-225321 19900809
- 主分类号： F26B1330
- IPC分类号： F26B1330
摘要：
A wafer conveyor system for use in a vacuum processing apparatus wherein the conveyor structure is provided with a transfer structure, and a robot apparatus is arranged on the transfer structure. The robot provides for rotation of the wafer in a horizontally from a position in a cassette to an opposite position of the cassette.
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