- 专利标题: Manufacturing method and manufacturing apparatus of image displaying apparatus
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申请号: US09813138申请日: 2001-03-21
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公开(公告)号: US06634916B2公开(公告)日: 2003-10-21
- 发明人: Tetsuya Kaneko , Kohei Nakata , Toshihiko Miyazaki
- 申请人: Tetsuya Kaneko , Kohei Nakata , Toshihiko Miyazaki
- 优先权: JP2000-081482 20000323; JP2000-298028 20000929
- 主分类号: H01J926
- IPC分类号: H01J926
摘要:
An image display appratus is manufactured by processing a panel member through a plurality of chambers including ones for a bake processing and a getter processing. The getter processng is performed at a temperature lower than a temperature of the panel member subjected to the bake processing, to prevent degrading of a getter film.
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