发明授权
- 专利标题： Tandem process chamber
- 专利标题（中）： 串联处理室
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申请号： US09575025申请日： 2000-05-19
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公开(公告)号： US06635115B1公开(公告)日： 2003-10-21
- 发明人: Kevin Fairbairn , Jessica Barzilai , Hari K. Ponnekanti , W. N. (Nick) Taylor
- 申请人： Kevin Fairbairn , Jessica Barzilai , Hari K. Ponnekanti , W. N. (Nick) Taylor
- 主分类号： C23C1600
- IPC分类号： C23C1600
摘要：
The present invention provides an apparatus for vacuum processing generally comprising an enclosure having a plurality of isolated chambers formed therein, a gas distribution assembly disposed in each processing chamber, a gas source connected to the plurality of isolated chambers, and a power supply connected to each gas distribution assembly.
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