- 专利标题: Reinforced polishing pad for linear chemical mechanical polishing and method for forming
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申请号: US09888789申请日: 2001-06-25
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公开(公告)号: US06635211B2公开(公告)日: 2003-10-21
- 发明人: Wen-Chih Chiou , Ying-Ho Chen , Tsu Shih , Syun-Ming Jang
- 申请人: Wen-Chih Chiou , Ying-Ho Chen , Tsu Shih , Syun-Ming Jang
- 主分类号: B29C3912
- IPC分类号: B29C3912
摘要:
A continuous loop polishing pad that is reinforced by a reinforcing filler and a method for fabricating the polishing pad are described. The reinforced polishing pad is constructed by a sub-layer and a top layer, wherein the sub-layer defines an inner diameter of the polishing pad and contains a reinforcing filler with an aspect ratio of at least 10 oriented substantially in a circumferential direction of the continuous loop polishing pad. The top layer is laminated to the sub-layer with a top surface defining an outer diameter of the polishing pad, while both the sub-layer and the top layer are formed of a polymeric material. The invention further describes a method for fabricating the reinforced polishing pad in a continuous loop.
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