发明授权
- 专利标题: Apparatus and method for testing integrated circuits
- 专利标题(中): 集成电路测试装置和方法
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申请号: US09693339申请日: 2000-10-20
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公开(公告)号: US06636056B1公开(公告)日: 2003-10-21
- 发明人: Siegfried Fleischer
- 申请人: Siegfried Fleischer
- 主分类号: G01R31308
- IPC分类号: G01R31308
摘要:
A method and apparatus for testing the operability of a signal source formed on a die are described. A pair of modulators are formed on the die and coupled to the signal source. An optical unit is optically coupled to the pair of modulators, which are capable of modulating an optical beam in response to a signal provided by the signal source. The optical unit is capable of detecting modulation of the optical beam. To test the signal source, the signal source is set to generate a signal. If modulation of the optical beam is detected at the optical unit, then the signal source is operable. If modulation of the optical beam is not detected at the optical unit, then the signal source is not operable.
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