摘要：
A method including forming a photoimageable material on a substrate; developing the photoimageable material over an opening area, the photoimageable material over a first portion of the opening area developed to a first extent and the photoimageable material over a second portion of the opening area developed to a different second extent; removing developed photoimageable material from the opening area; and forming an opening in the substrate in the opening area.
公开/授权文献
- US20020081532A1 Methodology to introduce metal and via openings 公开/授权日：2002-06-27
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