发明授权
- 专利标题: Scanning electron microscope
- 专利标题(中): 扫描电子显微镜
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申请号: US10069571申请日: 2002-07-15
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公开(公告)号: US06646262B1公开(公告)日: 2003-11-11
- 发明人: Hideo Todokoro , Makoto Ezumi , Yoichi Ose , Naomasa Suzuki
- 申请人: Hideo Todokoro , Makoto Ezumi , Yoichi Ose , Naomasa Suzuki
- 主分类号: H01J3720
- IPC分类号: H01J3720
摘要:
A scanning electron microscope with an energy filter which can positively utilize secondary electrons and/or reflected electrons which collide against a mesh electrode and are lost. The scanning electron microscope which has a porous electrode for producing an electric field for energy-filtering electrons produced by applying a primary electron beam to a sample and a 1st electron detector which detects electrons passing through the porous electrode is characterized by further having a porous structure provided near the sample, a deflector which deflects electrons from the axis of the primary electron beam, and a 2nd electron detector which detects the electrons deflected by the deflector.
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