发明授权
US06647641B1 Device and method for the treatment of substrates in a fluid container
失效
用于处理流体容器中的基底的装置和方法
- 专利标题: Device and method for the treatment of substrates in a fluid container
- 专利标题(中): 用于处理流体容器中的基底的装置和方法
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申请号: US09367683申请日: 1999-12-03
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公开(公告)号: US06647641B1公开(公告)日: 2003-11-18
- 发明人: Martin Weber
- 申请人: Martin Weber
- 优先权: DE19706072 19970217
- 主分类号: F26B300
- IPC分类号: F26B300
摘要:
A device for the treatment of substrates has a fluid container and two substrate transport devices positionable above the fluid container. Each substrate transport device is a hood for receiving multiple substrates. Each substrate transport device has at least one substrate support device having a first position for locking the substrates and a second position for releasing the substrates. The substrate transport devices are rigidly connected to one another and linearly movable for alternatingly positioning one of the substrate transport devices above the fluid container.
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