- 专利标题: Semiconductor test apparatus, and method of testing semiconductor device
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申请号: US09927367申请日: 2001-08-13
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公开(公告)号: US06651023B2公开(公告)日: 2003-11-18
- 发明人: Hisaya Mori , Shinji Yamada , Teruhiko Funakura
- 申请人: Hisaya Mori , Shinji Yamada , Teruhiko Funakura
- 优先权: JP2001-032852 20010208
- 主分类号: G06F1300
- IPC分类号: G06F1300
摘要:
A semiconductor test apparatus includes an analog-to-digital converter for converting into a digital signal an analog output from a circuit under test; a test-apparatus-ADC-control-signal generation circuit for generating a control signal for the analog-to-digital converter in accordance with an activation signal entered from the outside; a measured data memory for storing, as measured data for each conversion, a signal output from the analog-to-digital converter; an address counter for generating an address signal for the measured data memory; a DAC counter for generating data to be input to the circuit under test; and a data write control circuit which produces, in response to a flag signal output from the analog-to-digital converter and representing that conversion is being performed, an update signal for the address counter, a memory write signal for the measured data memory, and an update signal for the DAC counter.
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