Invention Grant
US06653047B2 Photoresist monomers containing fluorine-substituted benzylcarboxylate and photoresist polymers comprising the same
失效
含有氟取代的苄基羧酸酯的光致抗蚀剂单体和包含其的光致抗蚀剂聚合物
- Patent Title: Photoresist monomers containing fluorine-substituted benzylcarboxylate and photoresist polymers comprising the same
- Patent Title (中): 含有氟取代的苄基羧酸酯的光致抗蚀剂单体和包含其的光致抗蚀剂聚合物
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Application No.: US10107650Application Date: 2002-03-27
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Publication No.: US06653047B2Publication Date: 2003-11-25
- Inventor: Geun Su Lee , Jae Chang Jung , Ki Soo Shin
- Applicant: Geun Su Lee , Jae Chang Jung , Ki Soo Shin
- Priority: KR2001-35468 20010621
- Main IPC: G03F7004
- IPC: G03F7004

Abstract:
Photoresist monomers, photoresist polymers prepared therefrom, and photoresist compositions using the polymers are disclosed. More specifically, photoresist polymers comprising a photoresist monomer containing fluorine-substituted benzylcarboxylate represented by Formula 1, and a composition comprising the polymer are disclosed. The photoresist composition has excellent etching resistance, heat resistance and adhesiveness, and can be developed in aqueous tetramethylammonium hydroxide (TMAH) solution. And, the present photoresist composition is suitable to form a fine pattern using deep ultraviolet light source such as VUV (157 nm), since the composition has low light absorbance at 193 nm and 157 nm wavelength. wherein, X1, X2, R1, l and m are defined in the specification.
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