发明授权
- 专利标题： Configuration for measurement of internal voltages of an integrated semiconductor apparatus
- 专利标题（中）： 用于测量集成半导体器件的内部电压的配置
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申请号： US09740633申请日： 2000-12-18
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公开(公告)号： US06657452B2公开(公告)日： 2003-12-02
- 发明人: Peter Beer , Carsten Ohlhoff
- 申请人： Peter Beer , Carsten Ohlhoff
- 优先权： DE19961107 19991217
- 主分类号： G01R3126
- IPC分类号： G01R3126
摘要：
The invention relates to a configuration for the measurement of internal voltages in a DUT (2), in which a comparator (3) is provided in each DUT (2) and compares the internal voltage (Vint) to be measured with an externally supplied reference voltage (Vref).