- 专利标题： Dual cassette centrifugal processor
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申请号： US10164164申请日： 2002-06-05
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公开(公告)号： US06660104B2公开(公告)日： 2003-12-09
- 发明人: Raymon F. Thompson , Clif Neil
- 申请人： Raymon F. Thompson , Clif Neil
- 主分类号： B08B700
- IPC分类号： B08B700
摘要：
In a method for processing flat media, such as semiconductor wafers, first and second cassettes carrying wafers are loaded into a dual position rotor. The cassettes are restrained within the rotor by support tubes and hold down pins. Processing capacity is increased, as two cassettes are simultaneously processed.
公开/授权文献
- US20020179122A1 Dual cassette centrifugal processor 公开/授权日：2002-12-05
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