- 专利标题: Laser chamber insulator with sealed electrode feedthrough
-
申请号: US10164885申请日: 2002-06-07
-
公开(公告)号: US06661826B2公开(公告)日: 2003-12-09
- 发明人: Richard C. Ujazdowski , Timothy S. Dyer , William N. Partlo , Michael Altheim , Brian Strate , Thomas Hofmann
- 申请人: Richard C. Ujazdowski , Timothy S. Dyer , William N. Partlo , Michael Altheim , Brian Strate , Thomas Hofmann
- 主分类号: H01S3223
- IPC分类号: H01S3223
摘要:
A feedthrough structure of a gas discharge laser chamber conducts electric power through the wall of a sealed gas enclosure to a single piece elongated electrode inside the enclosure. The feedthrough structure includes a single piece integrated main insulator larger than the electrode. The main insulator is compressed between the electrode and the wall of the enclosure. The surfaces forming interfaces between the electrode and the single piece insulator are the insulator and the wall are all very smooth to permit the parts to expand and contract as the chamber temperature varies. The feedthrough structure also provides mechanical support and alignment for the electrode and includes seals to prevent gas leakage around the feedthrough structure.
公开/授权文献
信息查询