发明授权
US06662817B2 Gas-line system for semiconductor-manufacturing apparatus 有权
半导体制造装置的气体线路系统

  • 专利标题: Gas-line system for semiconductor-manufacturing apparatus
  • 专利标题(中): 半导体制造装置的气体线路系统
  • 申请号: US09967727
    申请日: 2001-09-28
  • 公开(公告)号: US06662817B2
    公开(公告)日: 2003-12-16
  • 发明人: Takayuki YamagishiMasaei Suwada
  • 申请人: Takayuki YamagishiMasaei Suwada
  • 优先权: JP2000-304840 20001004
  • 主分类号: G05D1113
  • IPC分类号: G05D1113
Gas-line system for semiconductor-manufacturing apparatus
摘要:
A gas-line system used for a semiconductor-manufacturing apparatus with at least two reactors, includes at least one gas source; a flow-divider means including an input port on the primary side, which receives a source gas from the gas source, and an output port on the secondary side, which outputs an inputted source gas by equally distributing it. The input port on the primary side is connected with the gas source and the output port on the secondary side is connected with the reactors; and one exhaust pump for exhausting gases within the reactors, which is connected with the reactors. It is desirable that the gas-line system is provided between the reactors and the exhaust pump, and an APC is included for controlling pressure for each reactor.
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