发明授权
US06663986B2 Magneto-resistive stripe element having a thin film conductor covered by a conductive capping layer 有权
具有由导电覆盖层覆盖的薄膜导体的磁阻条纹元件

  • 专利标题: Magneto-resistive stripe element having a thin film conductor covered by a conductive capping layer
  • 专利标题(中): 具有由导电覆盖层覆盖的薄膜导体的磁阻条纹元件
  • 申请号: US10034007
    申请日: 2001-12-27
  • 公开(公告)号: US06663986B2
    公开(公告)日: 2003-12-16
  • 发明人: Steven Castle Sanders
  • 申请人: Steven Castle Sanders
  • 主分类号: G11B539
  • IPC分类号: G11B539
Magneto-resistive stripe element having a thin film conductor covered by a conductive capping layer
摘要:
A magneto-resistive (MR) stripe element includes a magnetically active body portion and a tri-layer electrical conductor structure arranged proximate the magnetically active body portion. The conductor structure has an alpha-Ta bi-layer film and a chromium capping layer. The alpha-Ta bi-layer film includes a chromium base layer and a tantalum layer. The capping layer caps the alpha-Ta bi-layer film such that the tantalum layer is disposed between the chromium base layer and the chromium capping layer. The tri-layer conductor structure has minimized compressive stress after deposition of the three layers and an even lower compressive stress after annealing. The thickness of the chromium capping layer is dependent at least upon the thickness of the chromium base layer such that the tri-layer conductor has a minimized compressive stress after deposition and annealing. The MR stripe element may be incorporated in a magnetic read head for reading data from a magnetic storage medium.
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