发明授权
- 专利标题: Method of forming retrograde n-well and p-well
- 专利标题(中): 逆行n井和p井的形成方法
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申请号: US10063406申请日: 2002-04-19
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公开(公告)号: US06667205B2公开(公告)日: 2003-12-23
- 发明人: Matthew J. Breitwisch , Chung H. Lam , James A. Slinkman
- 申请人: Matthew J. Breitwisch , Chung H. Lam , James A. Slinkman
- 主分类号: H01L218238
- IPC分类号: H01L218238
摘要:
A method of forming retrograde n-wells and p-wells. A first mask is formed on the substrate and the n-well implants are carried out. Then the mask is thinned, and a deep p implant is carried out with the thinned n-well mask in place. This prevents Vt shifts in FETs formed in the n-well adjacent the nwell-pwell interface. The thinned mask is then removed, a p-well mask is put in place, and the remainder of the p-well implants are carried out.
公开/授权文献
- US20030197227A1 Method of forming retrograde n-well and p-well 公开/授权日:2003-10-23