发明授权
- 专利标题: Shutter disk and blade alignment sensor
- 专利标题(中): 快门盘和刀片对准传感器
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申请号: US10082480申请日: 2002-02-20
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公开(公告)号: US06669829B2公开(公告)日: 2003-12-30
- 发明人: Michael Feltsman , Allen Lau , Michael Rosenstein , Marc O. Schweitzer
- 申请人: Michael Feltsman , Allen Lau , Michael Rosenstein , Marc O. Schweitzer
- 主分类号: C23C1400
- IPC分类号: C23C1400
摘要:
The present invention generally provides a physical vapor deposition chamber and a method for detecting a position of a shutter disk within a physical vapor deposition chamber. In one embodiment, a physical vapor deposition chamber includes a chamber body having a shutter disk mechanism disposed therein. A housing is sealingly coupled to a sidewall of the chamber body and communicates therewith through a slot formed through the sidewall. At least a first sensor is disposed adjacent to the housing and orientated to detect the presence of a shutter disk mechanism within the housing. In one embodiment, a method for detecting the position of a shutter disk within a physical vapor deposition chamber having a substrate support generally includes moving the shutter disk away from a substrate support, and changing a state of a first sensor in response to a position of an edge the shutter disk.
公开/授权文献
- US20030155234A1 Shutter disk and blade alignment sensor 公开/授权日:2003-08-21
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