发明授权
- 专利标题: Ink-jet recording head and method of producing the same
- 专利标题(中): 喷墨记录头及其制造方法
-
申请号: US10175157申请日: 2002-06-20
-
公开(公告)号: US06672713B2公开(公告)日: 2004-01-06
- 发明人: Shuji Koike , Yoshiaki Sakamoto , Tomohisa Shingai , Seigen Otani , Toshihiko Osada
- 申请人: Shuji Koike , Yoshiaki Sakamoto , Tomohisa Shingai , Seigen Otani , Toshihiko Osada
- 主分类号: B41J2045
- IPC分类号: B41J2045
摘要:
A highly accurate, downsized ink-jet recording head producible at low cost by using a thin-film deposition technology is provided. The ink-jet recording head, in which a piezoelectric layer is formed subsequent to an electrode layer on a substrate by using a thin-film deposition technology and an energy-generating element for generating energy for ink ejection is formed by etching the electrode and the piezoelectric layers simultaneously by an ion milling process, includes a fine powder reception part on which mixed fine powders including at least those etched off the electrode layer and the piezoelectric layer by the ion milling process are deposited, the fine powder reception part being provided in a periphery of the energy-generating element.
公开/授权文献
- US20030007036A1 Ink-jet recording head and method of producing the same 公开/授权日:2003-01-09
信息查询