发明授权
- 专利标题: Polymer, resist composition and patterning process
- 专利标题(中): 聚合物,抗蚀剂组合物和图案化工艺
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申请号: US09951523申请日: 2001-09-14
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公开(公告)号: US06673515B2公开(公告)日: 2004-01-06
- 发明人: Tsunehiro Nishi , Mutsuo Nakashima , Seiichiro Tachibana , Takeshi Kinsho , Koji Hasegawa , Takeru Watanabe , Jun Hatakeyama
- 申请人: Tsunehiro Nishi , Mutsuo Nakashima , Seiichiro Tachibana , Takeshi Kinsho , Koji Hasegawa , Takeru Watanabe , Jun Hatakeyama
- 优先权: JP2000-279164 20000914
- 主分类号: G03F7038
- IPC分类号: G03F7038
摘要:
The invention provides a polymer comprising recurring units of formula (1—1) or (1-2) wherein k is 0 or 1, m is 0, 1, 2, 3 or 4, and n is 1 or 2 and having a weight average molecular weight of 1,000 to 500,000. A resist composition comprising the polymer as a base resin is sensitive to high-energy radiation, has excellent sensitivity, resolution, and etching resistance, and lends itself to micropatterning with electron beams or deep-UV.
公开/授权文献
- US20020061463A1 Polymer, resist composition and patterning process 公开/授权日:2002-05-23
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