Invention Grant
US06674241B2 Plasma processing apparatus and method of controlling chemistry 失效
等离子体处理装置及化学控制方法

  • Patent Title: Plasma processing apparatus and method of controlling chemistry
  • Patent Title (中): 等离子体处理装置及化学控制方法
  • Application No.: US10199120
    Application Date: 2002-07-22
  • Publication No.: US06674241B2
    Publication Date: 2004-01-06
  • Inventor: Eric J. StrangPaul Moroz
  • Applicant: Eric J. StrangPaul Moroz
  • Main IPC: H05B3126
  • IPC: H05B3126
Plasma processing apparatus and method of controlling chemistry
Abstract:
A plasma processing apparatus including a processing chamber having an upper surface, a first inlet, and a second inlet. The apparatus includes a wall extending from the upper surface into the processing chamber. The wall encircles the first inlet, and the wall has a base end and a terminal end, where the terminal end includes the second inlet. The apparatus includes a first inductive coil provided within the wall and encircling the first inlet, and a second inductive coil provided within the wall and encircling the second inlet. Additionally, the apparatus includes a first magnet array provided within the base end of the wall adjacent the first inlet, and a second magnet array provided within the terminal end of the wall adjacent the second inlet. A method of controlling plasma chemistry within a plasma processing apparatus is provided that includes the steps of providing a first magnetic field about a first injection region and providing a second magnetic field about a second injection region. The method further includes introducing a first process gas into the first injection region via a first inlet, and introducing a second process gas into the second injection region via a second inlet. The chamber has a wall encircling the first inlet, such that the wall has a terminal end including the second inlet.
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