发明授权
US06677680B2 Hybrid low-k interconnect structure comprised of 2 spin-on dielectric materials
有权
混合低k互连结构由2个旋涂电介质材料组成
- 专利标题: Hybrid low-k interconnect structure comprised of 2 spin-on dielectric materials
- 专利标题(中): 混合低k互连结构由2个旋涂电介质材料组成
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申请号: US09795429申请日: 2001-02-28
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公开(公告)号: US06677680B2公开(公告)日: 2004-01-13
- 发明人: Stephen McConnell Gates , Jeffrey Curtis Hedrick , Satyanarayana V. Nitta , Sampath Purushothaman , Cristy Sensenich Tyberg
- 申请人: Stephen McConnell Gates , Jeffrey Curtis Hedrick , Satyanarayana V. Nitta , Sampath Purushothaman , Cristy Sensenich Tyberg
- 主分类号: H01L2348
- IPC分类号: H01L2348
摘要:
A metal wiring plus low-k dielectric interconnect structure of the dual damascene-type is provided wherein the conductive metal lines and vias are built into a hybrid low-k dielectric which includes two spun-on dielectrics that have different atomic compositions and at least one of the two spun-on dielectrics is porous. The two spun-on dielectrics used in forming the inventive hybrid low-k dielectric each have a dielectric constant of about 2.6 or less, preferably each dielectric of the hybrid structure has a k of from about 1.2 to about 2.2. By utilizing the inventive hybrid low-k dielectric excellent control over metal line resistance (trench depth) is obtained, without no added cost. This is achieved without the use of a buried etch stop layer, which if present, would be formed between the two spun-on dielectrics. Moreover, the spun-on dielectrics of the hybrid low-k dielectric have distinctly different atomic compositions enabling control over the conductor resistance using the bottom spun-on dielectric (i.e., via dielectric) as an inherent etch stop layer for the upper spun-on dielectric (i.e., line dielectric).
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