- 专利标题: Non-volatile memory device and fabrication method thereof
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申请号: US10134223申请日: 2002-04-25
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公开(公告)号: US06680227B2公开(公告)日: 2004-01-20
- 发明人: Tung-Cheng Kuo , Chien-Hung Liu , Shyi-Shuh Pan , Shou-Wei Huang
- 申请人: Tung-Cheng Kuo , Chien-Hung Liu , Shyi-Shuh Pan , Shou-Wei Huang
- 优先权: TW91105279 20020320
- 主分类号: H01L218238
- IPC分类号: H01L218238
摘要:
A nonvolatile read-only memory device, wherein a word line is on a substrate and the word line includes a metal layer a polysilicon line. A trapping layer is further located between the word line and the substrate. A polysilicon protection line is formed over the substrate and the polysilicon protection line connects the word line and a grounded doped region in the substrate, wherein the resistance of the polysilicon protection line is higher than that of the word line.
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