发明授权
- 专利标题: Partial objective in an illuminating systems
- 专利标题(中): 照明系统的部分目标
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申请号: US09969441申请日: 2001-10-01
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公开(公告)号: US06680803B2公开(公告)日: 2004-01-20
- 发明人: Jörg Schultz , Alexander Sohmer , Alexander Epple , Johannes Wangler , Christa Müller
- 申请人: Jörg Schultz , Alexander Sohmer , Alexander Epple , Johannes Wangler , Christa Müller
- 优先权: DE10108677 20010223
- 主分类号: G02B300
- IPC分类号: G02B300
摘要:
Partial objective for illumination of an image field in an illuminating device of a microlithographic projection exposure apparatus, arranged between a aperture plane and an image plane. The partial objective comprises a first lens group and a second lens group with a lens with a first aspheric lens surface. The second lens group has at least a first lens with negative refractive power and at least a second lens with positive refractive power. The maximum field height Yimmax within the image field is at least 40 mm; the image-side numerical aperture is at least 0.15. The distribution of the chief ray angles PF over the field heights Yim within the image field is given by a pupil function PF(Yim), which consists of a linear contribution c1·Yim and a non-linear contribution PFNL(Yim), the non-linear contribution PFNL(Yim) being at least +15 mrad for the maximum positive field height Yimmax.
公开/授权文献
- US20020036832A1 Partial objective in an illuminating systems 公开/授权日:2002-03-28
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