Invention Grant
US06682871B2 Microelectromechanical optical switch and method of manufacture thereof 失效
微机电光开关及其制造方法

  • Patent Title: Microelectromechanical optical switch and method of manufacture thereof
  • Patent Title (中): 微机电光开关及其制造方法
  • Application No.: US09789887
    Application Date: 2001-02-21
  • Publication No.: US06682871B2
    Publication Date: 2004-01-27
  • Inventor: Nan Zhang
  • Applicant: Nan Zhang
  • Main IPC: G03F700
  • IPC: G03F700
Microelectromechanical optical switch and method of manufacture thereof
Abstract:
A MEMS-based optical switch having improved characteristics and methods for manufacturing the same are provided. In accordance with one embodiment, an optical switch includes a single comb drive actuator having a deflecting beam structure and a mirror coupled to the actuator. The mirror is capable of being moved between an extended position interposed between waveguide channels and a retracted position apart from the waveguide channels. The actuator applies a force capable of deflecting the beam structure and moving the mirror to one of the extended positions or the retracted position and the beam structure returns the mirror to the other of the extended position or the retracted position in the absence of the application of force.
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