发明授权
- 专利标题: Polished-piece holder and manufacturing method thereof
- 专利标题(中): 抛光片夹持器及其制造方法
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申请号: US10082683申请日: 2002-02-25
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公开(公告)号: US06686023B2公开(公告)日: 2004-02-03
- 发明人: Katsuji Takahashi , Hirokazu Hiraoka , Masayuki Noda
- 申请人: Katsuji Takahashi , Hirokazu Hiraoka , Masayuki Noda
- 优先权: JP2001-049653 20010226
- 主分类号: B32B2712
- IPC分类号: B32B2712
摘要:
A polished-piece holder is provided that does not easily stick or adsorb to a polishing pad of a polishing apparatus and reduces occurrences of production line troubles and therefore the number of failed polished pieces. A single sheet of a thermosetting resin impregnated fiber substrate or a laminated sheet formed by laminating a plurality of sheets of the thermosetting resin impregnated fiber substrate is formed under heat and pressure into a plate. The thermosetting resin impregnated fiber plate is then processed to form a polished-piece holder for holding pieces to be polished. The evaluation portion has a certain length in a direction of the average line. The thermosetting resin impregnated fiber plate has a surface roughness with a maximum wave height Ry of 10 &mgr;m or greater over an almost entire area of the surface layer. The maximum wave height Ry is determined in an evaluation portion of a wave curve by summing a height Rp of a highest crest and a depth Rv of a deepest trough from an average line of the wave curve. The wave curve is taken from a cross-sectional curve obtained by the surface roughness measuring device.
公开/授权文献
- US20020160150A1 Polished-piece holder and manufacturing method thereof 公开/授权日:2002-10-31
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