发明授权
- 专利标题: Microelectromechanical (MEMS) switching apparatus
- 专利标题(中): 微机电(MEMS)开关装置
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申请号: US10194096申请日: 2002-07-11
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公开(公告)号: US06686820B1公开(公告)日: 2004-02-03
- 发明人: Qing Ma , Valluri Rao , John Heck , Li-Peng Wang , Dong Shim , Quan Tran
- 申请人: Qing Ma , Valluri Rao , John Heck , Li-Peng Wang , Dong Shim , Quan Tran
- 主分类号: H01P110
- IPC分类号: H01P110
摘要:
This application discloses a microelectromechanical (MEMS) switch apparatus comprising an anchor attached to a substrate and an electrically conductive beam attached to the anchor and in electrical contact therewith. The beam comprises a tapered portion having a proximal end and a distal end, the proximal end being attached to the anchor, an actuation portion attached to the distal end of the tapered portion, a tip attached to the actuation portion, the tip having a contact dimple thereon. The switch apparatus also includes an actuation electrode attached to the substrate and positioned between the actuation portion and the substrate. Additional embodiments are also described and claimed.
公开/授权文献
- US20040008097A1 MICROELECTROMECHANICAL (MEMS) SWITCHING APPARATUS 公开/授权日:2004-01-15
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