Invention Grant
- Patent Title: Control system for an electrostatically-driven microelectromechanical device
- Patent Title (中): 用于静电驱动的微机电装置的控制系统
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Application No.: US10101589Application Date: 2002-03-21
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Publication No.: US06687112B2Publication Date: 2004-02-03
- Inventor: Jin-Chern Chiou , Yu-Chen Lin
- Applicant: Jin-Chern Chiou , Yu-Chen Lin
- Main IPC: H01H900
- IPC: H01H900

Abstract:
The present invention relates to a control system for an electrostatically-driven microelectromechanical device, which uses multiple electrodes to control the microelectromechanical device, i.e. the lower driven electrode of a capacitor with known two parallel driven electrodes is cut into a number of small electrodes. By selecting an electrode pattern for a desired electrostatic force, it is capable of altering the non-linearity of the device based on various applications and achieving a characteristic such as a linear driven, digital driven, or ultimately optimal driven manners, which is able to reach high operation accuracy for the existing circuit that only possesses a limited accuracy.
Public/Granted literature
- US20030189807A1 Control system for an electrostatically-driven microelectromechanical device Public/Granted day:2003-10-09
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