Invention Grant
- Patent Title: Optimized metal fuse process
- Patent Title (中): 优化金属保险丝工艺
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Application No.: US09997980Application Date: 2001-11-30
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Publication No.: US06687973B2Publication Date: 2004-02-10
- Inventor: Melissa M. Hewson , Ricky A. Jackson , Abha Singh , Toan Tran , Howard L. Tigelaar
- Applicant: Melissa M. Hewson , Ricky A. Jackson , Abha Singh , Toan Tran , Howard L. Tigelaar
- Main IPC: H01S400
- IPC: H01S400

Abstract:
A metal fuse process that uses a thinner (e.g., 6000 Å) oxide (108) over the top interconnect (102). The oxide (108) is removed over the probe pads (106) for testing but is not removed over the fuses (104). Because the oxide (108) is thin at the upper corners of the fuse (104), the oxide (108) cracks over the fuse (104) during a laser pulse (114). A wet etch is then used to dissolve the exposed fuses (104).
Public/Granted literature
- US20020062549A1 Optimized metal fuse process Public/Granted day:2002-05-30
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