Invention Grant
US06687973B2 Optimized metal fuse process 有权
优化金属保险丝工艺

Optimized metal fuse process
Abstract:
A metal fuse process that uses a thinner (e.g., 6000 Å) oxide (108) over the top interconnect (102). The oxide (108) is removed over the probe pads (106) for testing but is not removed over the fuses (104). Because the oxide (108) is thin at the upper corners of the fuse (104), the oxide (108) cracks over the fuse (104) during a laser pulse (114). A wet etch is then used to dissolve the exposed fuses (104).
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