发明授权
- 专利标题: Monolithic ink-jet printhead
- 专利标题(中): 单片喷墨打印头
-
申请号: US10278991申请日: 2002-10-24
-
公开(公告)号: US06692112B2公开(公告)日: 2004-02-17
- 发明人: Hyeon-cheol Kim , Yong-soo Oh , Keon Kuk , Kwang-joon Yoon , Jae-sik Min , Sang-hyun Lee , Chang-seung Lee , Seog Soon Baek , Sang-wook Lee , Jong-cheol Shin
- 申请人: Hyeon-cheol Kim , Yong-soo Oh , Keon Kuk , Kwang-joon Yoon , Jae-sik Min , Sang-hyun Lee , Chang-seung Lee , Seog Soon Baek , Sang-wook Lee , Jong-cheol Shin
- 优先权: KR2001-66021 20011025
- 主分类号: B41J205
- IPC分类号: B41J205
摘要:
A monolithic ink-jet printhead, and a method for manufacturing the same, wherein the monolithic ink-jet printhead includes a manifold for supplying ink, an ink chamber having a hemispheric shape, and an ink channel formed monolithically on a substrate; a silicon oxide layer, in which a nozzle for ejecting ink is centrally formed in the ink chamber, is deposited on the substrate; a heater having a ring shape is formed on the silicon oxide layer to surround the nozzle; a MOS integrated circuit is mounted on the substrate to drive the heater and includes a MOSFET and electrodes connected to the heater. The silicon oxide layer, the heater, and the MOS integrated circuit are formed monolithically on the substrate. Additionally, a DLC coating layer having a high hydrophobic property and high durability is formed on an external surface of the printhead.
公开/授权文献
信息查询