发明授权
- 专利标题: Apparatus for measuring slant angle of solid immersion lens
- 专利标题(中): 用于测量固体浸没透镜的倾斜角度的装置
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申请号: US10163135申请日: 2002-06-04
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公开(公告)号: US06693705B2公开(公告)日: 2004-02-17
- 发明人: Yeung Joon Sohn , Gee Pyeong Han , Yark Yeon Kim , Tae Youb Kim , Mun Cheol Paek , Kyoung Ik Cho
- 申请人: Yeung Joon Sohn , Gee Pyeong Han , Yark Yeon Kim , Tae Youb Kim , Mun Cheol Paek , Kyoung Ik Cho
- 优先权: KR2001-86835 20011228
- 主分类号: G01B900
- IPC分类号: G01B900
摘要:
The present invention relates to an apparatus for measuring a slant angle in a solid immersion lens. In a near-field optical data storage head for storing/reading data using a solid immersion lens (SIL), a parallel light is formed within the plane of the solid immersion lens and the slant angle of the parallel light is then measured using the angle measurement principle of the autocollimator in order to measure the slant angle of the solid immersion lens. For this, the present invention includes an optical system for generating the parallel light within the solid immersion lens, and a unit for measuring the slant angle of the solid immersion lens using a location detection unit. An incident light becomes the parallel light by the optical system and the curved face of the solid immersion lens. The reflected light is also focused on the location detection unit. The location detection unit converts the reflection angle of the reflecting light into a location value to calculate the angle value.