发明授权
- 专利标题： Photo assisted electrical linewidth measurement method and apparatus
- 专利标题（中）： 照片辅助电线宽度测量方法和装置
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申请号： US09907311申请日： 2001-07-17
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公开(公告)号： US06696847B1公开(公告)日： 2004-02-24
- 发明人: Bruno M. LaFontaine , Jongwook Kye , Harry Levinson
- 申请人： Bruno M. LaFontaine , Jongwook Kye , Harry Levinson
- 主分类号： G01R31302
- IPC分类号： G01R31302
摘要：
In the present method of electrically testing the width of a line, a short pulse of laser energy is applied to the line to generate conductive electrons therein. An electrical potential is applied to the line to cause electrons to flow in the line, and current is measured to determine the width of the line.
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